Generation of Extremely High Vacuum with a New Sputter Ion Pump.
نویسندگان
چکیده
منابع مشابه
New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications.
A simple design for a cesium sputter ion source compatible with vacuum and ion-optical systems as well as with electronics of the commercially available Cameca IMS-4f instrument is reported. This ion source has been tested with the cluster primary ions of Si(n)(-) and Cu(n)(-). Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of the an...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1994
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.37.732